This is by no means a comprehensive list and it especially leaves out performances like Battlebots which are a whole lot more about sports and gladiator entertainment rather than theatre. And do a google search for "animitronics" for other robot performances and robot puppets, of course.
Omnicircus - This one I found pretty disturbing, but watching the video was encouraging as he had some things going on which I didn't think were possible. Is this show kid-friendly? Hmmmm, probably not. It's very scary, no doubt. Somewhat "off."
Survival Research Labs - I've been visiting SRL's site for years now. Large scale meyhem. They would have a wealth of information on logistics of touring, setting up a site, etc if I ever get to that point.
Amorphic Robot Works - Very cool. Very Slick. I'd love to have an image and site that is so well-done. There's is more of a performance environment, I think. Look at the QTVR of the performance space... one of these days
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